Fabrication of Multichannel Neural Microelectrodes with Microfluidic Channels Based on Wafer Bonding Technology

IFMBE Proceedings

Volumn 23, Issue , 2009, Pages 2258-2261

  Kobayashi, R ^a   Kanno, S ^a   Fukushima, T ^a   Tanaka, T ^a   Koyanagi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

multichannel neural microelectrode; Si intelligent neural probe; simultaneous multi site recording

Indexed keywords

ACTION POTENTIALS; HIGH-DENSITY RECORDING; HIPPOCAMPAL SLICE; MICROFLUIDIC CHANNEL; MULTI-SITE; MULTICHANNEL; NEURAL PROBES; WAFERBONDING TECHNOLOGY;

BIOMEDICAL ENGINEERING; ELECTROPHYSIOLOGY; FABRICATION; FLUIDIC DEVICES; NEURONS; PROBES; SILICON;

MICROELECTRODES;

EID: 77956758390     PISSN: 16800737     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-92841-6_566     Document Type: Conference Paper

References (4)

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3. D. T. Kewley, M. D. Hills, D. A. Borkholder et al. (1997) Plasmaetched neural probes. Sens. and Actuators A 58:27-35
4. T. Watanabe, K. Motonami, K. Sakamoto et al. (2004) Ultimate Functional Multi-Electrode System (UFMES) Based on Multi-Chip Bonding Technique. Ext. Abstr. Int. Conf. Solid State Devices and Materials, Tokyo, Japan, 2004, pp 380-381.