Reactive sputtering of SiO2-TiO2 thin film from composite Six/TiO2 targets

Vacuum

Volumn 85, Issue 2, 2010, Pages 317-321

  Liljeholm, L ^a   Nyberg, T ^a   Kubart, T ^a   Roos, A ^a   Berg, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

AR coating; Optical properties; Reactive sputtering; SixTiO2 films

Indexed keywords

AR COATINGS; COSPUTTERING; DEPOSITION PROCESS; OPTICAL THIN FILMS; OXYGEN FLOW; TARGET COMPOSITION; TIO; TRANSMITTANCE SPECTRA;

COATINGS; OPTICAL CONSTANTS; OXYGEN SUPPLY; REACTIVE SPUTTERING; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THIN FILMS;

OPTICAL FILMS;

EID: 77956611648     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2010.07.003     Document Type: Article

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