Pulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvesters

Journal of Electronic Materials

Volumn 39, Issue 9, 2010, Pages 1920-1925

  Abdel Aziz, Ahmed ^a   Elsayed, Mohannad ^a,b   Abu Bakr, Hassan ^a   El Rifai, Joumana ^a,c   Van Der Donck, Tom ^d   Celis, Jean Pierre ^d   Leonov, Vladimir ^c   Fiorini, Paolo ^c   Sedky, Sherif ^a  

^a AMERICAN UNIVERSITY IN CAIRO   (Egypt)

^b CAIRO UNIVERSITY   (Egypt)

^c IMEC   (Belgium)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

bismuth telluride (Bi Te); Pulsed laser deposition (PLD); thermoelectric energy harvesters

Indexed keywords

BISMUTH TELLURIDE; BISMUTH TELLURIDE THIN FILMS; BISMUTH-TELLURIDE COMPOUNDS; LOW STRESS; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; P-TYPE; PULSED LASER; PULSED-LASER DEPOSITION TECHNIQUE; THERMOELECTRIC ENERGY; THERMOELECTRIC FIGURE OF MERIT;

BINARY ALLOYS; BISMUTH; BISMUTH COMPOUNDS; COMPOSITE MICROMECHANICS; DEPOSITION; HARVESTERS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PULSED LASER DEPOSITION; TELLURIUM COMPOUNDS; THIN FILMS; VAPOR DEPOSITION;

PULSED LASERS;

EID: 77956226191     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-009-1047-1     Document Type: Article

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