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Volumn 19, Issue 10, 2010, Pages 1245-1248
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The relationship between structure and mechanical properties of hydrogenated amorphous carbon films
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Author keywords
Diamond like carbon (DLC); Elastic modulus; Elastic Recoil Detection Analysis (ERDA); Hydrogen content; Nanohardness; Nanoindentation; Raman spectroscopy; Structural disorder; Topological disorder
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Indexed keywords
DIAMOND-LIKE CARBON;
ELASTIC RECOIL DETECTION ANALYSIS;
HYDROGEN CONTENT;
STRUCTURAL DISORDERS;
TOPOLOGICAL DISORDER;
AMORPHOUS CARBON;
AMORPHOUS FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
ELASTIC MODULI;
FULL WIDTH AT HALF MAXIMUM;
HYDROGEN;
HYDROGENATION;
MECHANICAL PROPERTIES;
NANOHARDNESS;
NANOINDENTATION;
RAMAN SCATTERING;
RAMAN SPECTROSCOPY;
TOPOLOGY;
CARBON FILMS;
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EID: 77956064552
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2010.06.009 Document Type: Article |
Times cited : (18)
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References (13)
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