The development of a MEMS/NEMS-based 3 D.O.F. compliant micro robot

19th International Workshop on Robotics in Alpe-Adria-Danube Region, RAAD 2010 - Proceedings

Volumn , Issue , 2010, Pages 173-179

  Balucani, Marco ^a   Belfiore, Nicola Pio ^a   Crescenzi, Rocco ^a   Verotti, Matteo ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

Compliant mechanisms; MEMS; Microrobots

Indexed keywords

ACTUATION SYSTEMS; COMPLIANT MECHANISM; FINITE ELEMENT ANALYSIS; FLEXURAL HINGES; INNOVATIVE SOLUTIONS; MANUFACTURING IS; MEMS/NEMS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO MECHANISMS; MICROROBOTS; MINI-INVASIVE; MINIMUM THICKNESS; NEW APPROACHES; REMOTE SYSTEMS; SINGLE-STEP; THEORETICAL POINTS;

FINITE ELEMENT METHOD; INNOVATION; MACHINE DESIGN; MACHINING; MECHANISMS; ROBOTICS; ROBOTS;

MEMS;

EID: 77956053302     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RAAD.2010.5524590     Document Type: Conference Paper

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