Microscale oscillating crack propagation in silicon nitride thin films

Applied Physics Letters

Volumn 97, Issue 7, 2010, Pages

  Kim, Donghyun ^a   Makaram, Prashanth ^a   Thompson, Carl V ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PATHS; DIFFERENTIAL THERMAL EXPANSION; HEATING PROCESS; METAL PATTERNS; METAL THICKNESS; MICRO-SCALES; SILICON NITRIDE THIN FILMS;

METALS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; THERMAL EXPANSION; THIN FILMS; VAPOR DEPOSITION;

CRACKS;

EID: 77956032055     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3480408     Document Type: Article

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