메뉴 건너뛰기




Volumn 27, Issue 6, 2010, Pages 1303-1310

Modal analysis of lamellar gratings using the moment method with subsectional basis and adaptive spatial resolution

Author keywords

[No Author keywords available]

Indexed keywords

EIGENVALUES AND EIGENFUNCTIONS; METHOD OF MOMENTS; MODAL ANALYSIS;

EID: 77956002333     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.27.001303     Document Type: Article
Times cited : (19)

References (12)
  • 2
    • 0020192359 scopus 로고
    • Diffraction analysis of dielectric surface-relief gratings
    • M. G. Moharam and T. K. Gaylord, "Diffraction analysis of dielectric surface-relief gratings", J. Opt. Soc. Am. 72, 1385-1392 (1982).
    • (1982) J. Opt. Soc. Am. , vol.72 , pp. 1385-1392
    • Moharam, M.G.1    Gaylord, T.K.2
  • 3
    • 0019043064 scopus 로고
    • A new theoretical method for diffraction gratings and its numerical application
    • J. Chandezon, D. Maystre, and G. Raoult, "A new theoretical method for diffraction gratings and its numerical application", J. Opt. (Paris) 11, 235-241 (1980).
    • (1980) J. Opt. (Paris) , vol.11 , pp. 235-241
    • Chandezon, J.1    Maystre, D.2    Raoult, G.3
  • 4
    • 0033540126 scopus 로고    scopus 로고
    • Rigorous and efficient grating-analysis method made easy for optical engineers
    • L. Li, J. Chandezon, G. Granet, and J.-P. Plumey, "Rigorous and efficient grating-analysis method made easy for optical engineers", Appl. Opt. 38, 304-313 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 304-313
    • Li, L.1    Chandezon, J.2    Granet, G.3    Plumey, J.-P.4
  • 5
    • 0029304593 scopus 로고
    • Exponentially convergent and numerically efficient solution of Maxwell's equations for lamellar gratings
    • R. H. Morf, "Exponentially convergent and numerically efficient solution of Maxwell's equations for lamellar gratings", J. Opt. Soc. Am. A 12, 1043-1056 (1995).
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1043-1056
    • Morf, R.H.1
  • 7
    • 0038261894 scopus 로고    scopus 로고
    • Numerical performance of finite-difference modal method for the electromagnetic analysis of one-dimensional gratings
    • P. Lalanne and J. P. Hugonin, "Numerical performance of finite-difference modal method for the electromagnetic analysis of one-dimensional gratings", J. Opt. Soc. Am. A 17, 1033-1042 (2000).
    • (2000) J. Opt. Soc. Am. A , vol.17 , pp. 1033-1042
    • Lalanne, P.1    Hugonin, J.P.2
  • 8
    • 31544440430 scopus 로고    scopus 로고
    • Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion
    • Part 1
    • K. Edee, P. Schiavone, and G. Granet, "Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion", Jpn. J. Appl. Phys., Part 1 44, 6458-6462 (2005).
    • (2005) Jpn. J. Appl. Phys. , vol.44 , pp. 6458-6462
    • Edee, K.1    Schiavone, P.2    Granet, G.3
  • 10
    • 84938444118 scopus 로고
    • Matrix methods for field problem
    • R. Harrington, "Matrix methods for field problem", Proc. IEEE 55, 136-149 (1967).
    • (1967) Proc. IEEE , vol.55 , pp. 136-149
    • Harrington, R.1
  • 11
    • 0004486201 scopus 로고    scopus 로고
    • Reformulation of the lamellar grating problem through the concept of adaptive spatial resolution
    • G. Granet, "Reformulation of the lamellar grating problem through the concept of adaptive spatial resolution", J. Opt. Soc. Am. A 16, 2510-2516 (1999).
    • (1999) J. Opt. Soc. Am. A , vol.16 , pp. 2510-2516
    • Granet, G.1
  • 12
    • 1542285147 scopus 로고    scopus 로고
    • Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory
    • C. H. Sauvan, P. Lalanne, and J. P. Hugonin, "Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory", Opt. Quantum Electron. 36, 271-284 (2004).
    • (2004) Opt. Quantum Electron , vol.36 , pp. 271-284
    • Sauvan, C.H.1    Lalanne, P.2    Hugonin, J.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.