First automated production line for X-ray-LIGA (FELIG) is brought on line

Microsystem Technologies

Volumn 16, Issue 8-9, 2010, Pages 1287-1292

  Hahn, Lothar ^a   Schwartz, Georg ^a   Saile, Volker ^a   Schulz, Joachim ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED PRODUCTIONS; CONVEYOR LINES; LIGA TECHNIQUE; LIGA TECHNOLOGY; PROCESS STEPS; PRODUCTION COST; SOFTWARE SYSTEMS; SYNCHROTRON SOURCE; WHOLE PROCESS;

AUTOMATION;

EID: 77955851465     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0953-8     Document Type: Conference Paper

References (4)

1. Chung SJ, Hein H, Mohr J, Pantenburg FJ, Schulz J, Wallrabe U (2000) LIGA technology today and its industrial applications. Proc SPIE 4194
2. Hesselbach J, Raatz A, Wrege J, Herrmann H, Weule H, Fleischer J, Buchholz C, Tritschler H, Knoll M, Elsner J, Klocke F, Weck M, von Bodenhausen J, von Klitzing A (2003) Investigation on the international state of the art of micro production technology. In: Proceedings of the Euspen international topical conference, Aachen, 19-20 Mai 2003. Voerde, Rhiem Druck, 11-18
3. Meyer P, Schulz J, Hahn L (2003) DoseSim: Microsoft-Windows graphical user interface for using synchrotron X-ray exposure and subsequent development in the LIGA process. Rev Sci Instrum 74:1113-1119
4. Meyer P, Saile V, Schulz J, Klein O, Arendt M (2008) Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process. Int J Technol Transf Commer 7:362-370