Research on electrostatic micropump pull-in phenomena based on reduced order model

2010 International Conference on Intelligent Computation Technology and Automation, ICICTA 2010

Volumn 2, Issue , 2010, Pages 1154-1157

  Liu, Wen Yao ^a  

^a NINGBO POLYTECHNIC   (China)

Author keywords

Electrostatic; MEMS; Micropump; Pull in; Reduced order model(ROM)

Indexed keywords

3D FINITE ELEMENT MODEL; CIRCULAR MEMBRANES; COMPUTATIONAL COSTS; ELECTROSTATIC MICROPUMP; INITIAL GAP; MECHANICAL BEHAVIOR; MICRO PUMP; MODE SUPERPOSITION METHOD; NUMERICAL CALCULATION; PULL-IN; PULL-IN VOLTAGE; REDUCED ORDER MODELS; THEORETICAL BASIS;

ELECTROSTATICS; PUMPS; THREE DIMENSIONAL;

FINITE ELEMENT METHOD;

EID: 77955701785     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICICTA.2010.99     Document Type: Conference Paper

References (5)

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2. Raback P, Pursula A, "Finite Element Simulation of The Electromechanical Pull-in Phenomenon", European Congress on Computational Methods in Applied Sciences and Engineering, Jyvaskyla, 2004, pp. 1-13.
3. Lin Xiezhao, Yng Ji, Chen Zichen, "Multi-physics Analysis of an Electrostatically Actuated Microcantilever in Viscous Fluids", Transactions of the Chinese Society of Agricultural Machinery, 2009, vol.40, pp. 203-207. (in Chinese).
4. A. H. Nayfeh, P. F. Pai, "Linear and Nonlinear Structural Mechanics", New York: Wiley, 2004, pp. 388-392.
5. L. D. Gabbay, "Computer Aided Macromodeling for MEMS", PhD Dissertation, Massachusetts Institute of Technology, 1998.