Effective tool design of three-rank form as precision removal-process of ITO thin-films

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 19, Issue SUPPL. 1, 2009, Pages

  Pa, Pai Shan ^a  

^a NATIONAL TAIPEI UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

ITO; Precision recycle; Semiconductor; Thin films; Three rank form; Tool design

Indexed keywords

ITO; PRECISION RECYCLE; SEMICONDUCTOR; THREE-RANK FORM; TOOL DESIGN;

COLOR; COLOR FILMS; DESIGN; ELECTRIC DISCHARGES; ELECTROCHEMICAL ELECTRODES; OXIDE FILMS; RECYCLING; TIN; TITANIUM COMPOUNDS;

ITO GLASS;

EID: 77955670628     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(10)60276-2     Document Type: Article

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