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Volumn 518, Issue 16, 2010, Pages 4714-4717
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Synthesis of epitaxial BaZrO3 thin films by chemical solution deposition
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Author keywords
Barium zirconate; Chemical solution deposition; Thin films
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Indexed keywords
AFM;
ANNEALING TEMPERATURES;
CHEMICAL SOLUTION DEPOSITION;
EPITAXIAL THIN FILMS;
LOW TEMPERATURE PREPARATION;
MGO SUBSTRATE;
ROOT MEAN SQUARE ROUGHNESS;
SCAN MEASUREMENT;
SEM;
BARIUM;
BARIUM ZIRCONATE;
CHEMICALS;
DEPOSITION;
EPITAXIAL GROWTH;
VAPOR DEPOSITION;
EPITAXIAL FILMS;
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EID: 77955608808
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2009.12.066 Document Type: Conference Paper |
Times cited : (11)
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References (9)
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