Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces

Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007

Volumn , Issue , 2007, Pages 279-288

  Tonnellier, X ^a   Shore, P ^a   Morantz, P ^a   Baldwin, A ^a   Evans, R ^b   Walker, D D ^b,c  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

^c ZEEKO LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COORDINATE MEASURING MACHINES; MACHINE TOOLS; SURFACE ROUGHNESS;

DEPTH ZONES; GRINDING RESPONSE; MACHINE DYNAMICS; PRECISION GRINDING; RAPID GRINDING; SUB-SURFACE DAMAGE; SURFACE PROFILES; SURFACE WAVINESS;

GRINDING (MACHINING);

EID: 77955556858     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (28)

1. VanBrocklin, R.R. et al., 2004, Corning's approach to segment blank manufacturing for an extremely large telescope, Proc SPIE, Vol.5494, p.1.
2. Semenov, A.P. et al., 2004, Fabrication of blanks, figuring, polishing and testing of segmented astronomic mirrors for SALT and LAMOST projects, Proc SPIE, Vol.5494, p.31.
3. Geyl, R. et al., 2004, Gran telescopio canarias optics manufacture: progress report no3, Proc SPIE, Vol.5494, p.340.
4. Gilmozzi, R., 2004, Science and technology drivers for future giant telescopes, Proc SPIE, Vol.5489, p.1.
5. Shore, P. et al., 2003, Production challenge of the optical segments for extra large telescopes, International Workshop on EOS, p.25.
6. Shore, P. et al., 2005, Design philosophy of the ultra precision big optix "BoX" machine, Landamap Conference Proc., p.200.
7. Tonnellier, X. et al., 2006, Wheel wear investigations when precision grinding of optical materials using the BoX® grinding mode, 5th HSM Proc., p.177.
8. Tonnellier, X. et al., 2006, High performance grinding studies on optical materials suitable for large optics, 2nd HPC Proc.
9. Inasaki, I., 1987, Grinding of Hard and Brittle Materials, Annals of CIRP, Vol.36/2, p.463.
10. Bifano, T.G. et al., 1991, Ductile regime grinding - A new technology for machining brittle materials, J. of Engineering for Industry, Vol.113/2, p.184.
11. Shore, P. et al., 1995, Surface and near surface conditions of "ductile" mode ground Zerodur, 8th IPES Proc, p.365.
12. Lawn, B., 1975, Fracture of brittle solids, Cambridge university press.
13. Lawn, B. et al., 1977, A model for crack initiation in Elastic/plastic indentation fields, J. of Materials Science, Vol.2, p.2195.
14. Zhang, B. et al., 1995, Subsurface evaluation of ground ceramics, Annals of CIRP, Vol.44/1, p.263.
15. Maksoud, T.M.A et al., 1999, Evaluation of surface and sub-surface cracks of ground ceramic, J. of Materials Processing Technology, Vol.88, p.222.
16. Lambropoulos, J.C., 2000, From abrasive size to subsurface damage in grinding, Optical Fabrication and Testing, OSA Technical Digest, p.17.
17. Hed, P.P. et al., 1987, Optical glass fabrication technology 2: Relationship between surface roughness and subsurface damage, Applied Optics, Vol.26/21, p.4677.
18. Franse, J., 1991, Aspects of Precision Grinding, PhD thesis, Technische Universiteit Eindhoven.
19. Shore, P., 1995, Machining of optical surfaces in brittle materials using an ultra-precision machine tool, PhD thesis, Cranfield University.
20. Tonnellier, X. et al., 2007, Subsurface damage caused during rapid grinding of Zerodur, submitted ISAAT conference.
21. Tonshoff, H.K. et al., 1987, Detection of microcracks, Annals of CIRP, Vol.36/2, p.545.
22. Puttick, K.E. et al., 1992, Surface damage in nanoground silicon, IMECH Proc. - Tribology in metal cutting and grinding, p.49.
23. Ball, M.J. et al., 1991, Electrolytically assisted "ductile" mode diamond grinding of BK7 and SF10 optical glasses, Proc SPIE, Vol.1573, p.30.
24. Sun, X. et al., 2006, An investigation into parallel and cross grinding of BK7 glass, Precision Engineering, Vol.30/2, p.145.
25. Tonnellier, X. et al., 2006, Wheel wear and surface/subsurface qualities when precision grinding optical materials, Proc SPIE, Vol.6273, p. 627308.
26. Parks, R.E., 2004, Two approaches to generating Free-Form optics, ASPE 2004 Winter Topical Meeting Proc., p.88.
27. Kuriyagawa, T. et al., 1996, A new grinding method for aspheric ceramic mirrors, J. of Materials Processing Technology, Vol.62/4, p.387.
28. Cheung, C.F et al., 2000, Modelling and Simulation of Surface Topography in Ultra-Precision Diamond Turning, IMECH Proc, Vol.214/6, p.463.