New generation of SiC based biodevices implemented on 4" wafers

Materials Science Forum

Volumn 645-648, Issue , 2010, Pages 1097-1100

  Godignon, P ^a   Martin, I ^a   Gabriel, G ^a   Gomez, R ^a   Placidi, M ^a   Villa, R ^a  

^a CSIC   (Spain)

Author keywords

Biosensors; MEAs; Microfluidic; SiCOI

Indexed keywords

ARSENIC COMPOUNDS; BIOSENSORS; ELECTRODES; HIGH TEMPERATURE APPLICATIONS; MICROFLUIDICS; SEMICONDUCTOR DEVICES; SILICON CARBIDE; SILICON WAFERS; WIDE BAND GAP SEMICONDUCTORS;

BIOMEDICAL DEVICES; BIOSENSOR APPLICATIONS; GROWTH TECHNOLOGIES; HIGH TEMPERATURE SENSORS; MEAS; MICROFLUIDIC-BASED; SENSING PERFORMANCE; SICOI;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77955461476     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.645-648.1097     Document Type: Conference Paper

References (3)

1. R. Yakimova et al.: Journal of Physics D: Applied Physics, Vol. 40 (2007), p. 6435 doi:10.1088/0022-3727/40/20/S20. (Pubitemid 350093024)
2. P. Godignon: Mater. Sci. Forum, Vols. 483-485 (2005), p. 1009 doi:10.4028/www.scientific.net/MSF.483-485.1009.
3. I. Martin et al.: Microelectronic engineering, Vol. 85, (2008), p. 1202 doi:10.1016/j.mee.2008.01.061.