CVD oriented growth of carbon nanotubes using AlPO4-5 and L type zeolites

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1202-1205

  Martin, I ^a   Rius, G ^a   Atienzar, P ^b   Teruel, L ^b   Mestres, N ^c   Perez Murano, F ^a   Garcia, H ^b   Godignon, P ^a   Corma, A ^b   Lora Tamayo, E ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b CSIC   (Spain)

^c INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

Author keywords

Carbon nanotube growth; Chemical vapour deposition; Zeolites

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; ZEOLITES;

CARBON NANOTUBE GROWTH; CATALYST ACTIVATION;

CARBON NANOTUBES;

EID: 44149116267     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.061     Document Type: Article

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