A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel

Sensors and Actuators, A: Physical

Volumn 161, Issue 1-2, 2010, Pages 173-181

  Choi, Kee Bong ^a   Lee, Jae Jong ^a   Hata, Seiichi ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Amplification mechanism; Compliant mechanism; Flexure hinge; Piezoelectric element

Indexed keywords

AMPLIFICATION MECHANISM; COMPLIANT MECHANISM; DISPLACEMENT AMPLIFICATION; FLEXURE HINGE; HIGH-PRECISION; LONG-TRAVEL; MECHANICAL AMPLIFICATION; MOVING OBJECTS; OUTPUT FORCE; PIEZOELECTRIC ELEMENTS; REINFORCING MECHANISM; WIRE ELECTRO-DISCHARGE MACHINING;

AMPLIFICATION; HINGES; MECHANICAL ENGINEERING; NANOSENSORS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY;

MECHANISMS;

EID: 77955430403     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.05.027     Document Type: Article

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