Improvement in adhesion and decrease in stress of MgO thin films due to vapour chopping

Journal of Alloys and Compounds

Volumn 503, Issue 1, 2010, Pages 224-227

  Tamboli, Sikandar H ^a   Puri, Vijaya ^a   Puri, Ravinder K ^a  

^a SHIVAJI UNIVERSITY   (India)

Author keywords

Mechanical properties; Oxides materials; Thin film; Vapour deposition; X ray diffraction

Indexed keywords

DIRECT PULL; INTERFEROMETRIC METHODS; INTRINSIC STRESS; MAGNESIUM OXIDES; MGO THIN FILMS; OXIDATION TEMPERATURE; THERMAL OXIDATION; VAPOUR DEPOSITION;

ADHESION; MAGNESIUM; MATERIALS PROPERTIES; MECHANICAL PROPERTIES; OXIDATION; OXIDE FILMS; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION;

DEPOSITION;

EID: 77955306838     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2010.04.238     Document Type: Article

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