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Volumn 131, Issue 1, 2009, Pages 0110121-0110126

Modeling the tensile strength and crack length of wire-sawn silicon wafers

Author keywords

Etching; Fracture stress; Fracture theory; Silicon wafer; Strength; Weibull distribution

Indexed keywords

CRACK LENGTH; FRACTURE STRESS; FRACTURE TEST; GRIFFITH CRITERION; INDUCED CRACK; INTENSITY FUNCTIONS; NUMERICAL PARAMETERS; QUANTITATIVE DESCRIPTION; SCALING PARAMETER; TRUNCATION PARAMETER; WAFER SURFACE;

EID: 77955202652     PISSN: 01996231     EISSN: 15288986     Source Type: Journal    
DOI: 10.1115/1.3028048     Document Type: Article
Times cited : (17)

References (17)
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    • Basic mechanisms and models of multi-wire sawing
    • Möller, H. J., 2004, "Basic Mechanisms and Models of Multi-Wire Sawing," Adv. Eng. Mater., 6(7), pp. 502-513.
    • (2004) Adv. Eng. Mater. , vol.6 , Issue.7 , pp. 502-513
    • Möller, H.J.1
  • 4
    • 25644433099 scopus 로고    scopus 로고
    • Freiberger Forschungshefte B327 Freiberger Siliciumtage 2003, 54. Berg- und Hüttenmännischer Tag 2003, Herausgeber H.-J. Möller and G. Roewer
    • Funke, C., and Möller, H. J., 2003, "Microscopic Mechanisms of Multi-Wire Sawing," Freiberger Forschungshefte B327, Freiberger Siliciumtage 2003, 54. Berg- und Hüttenmännischer Tag 2003, Herausgeber H.-J. Möller and G. Roewer, pp. 206-228.
    • (2003) Microscopic Mechanisms of Multi-Wire Sawing , pp. 206-228
    • Funke, C.1    Möller, H.J.2
  • 9
    • 1642278732 scopus 로고
    • Random structure models for composite media and fracture statistics
    • K. Z. Markov, ed., World Scientific, Singapore
    • Jeulin, D., 1994, "Random Structure Models for Composite Media and Fracture Statistics," Advances in Mathematical Modelling of Composite Materials, K. Z. Markov, ed., World Scientific, Singapore, pp. 239-289.
    • (1994) Advances in Mathematical Modelling of Composite Materials , pp. 239-289
    • Jeulin, D.1
  • 12
    • 77955208659 scopus 로고
    • Electronic Materials Information Service, (Ma), INSPEC, London, EMIS datareviews service
    • Electronic Materials Information Service, 1988, Properties of Silicon,(Ma), INSPEC, London, EMIS datareviews service No. 4.
    • (1988) Properties of Silicon , Issue.4
  • 13
    • 0003749418 scopus 로고
    • 2nd ed., Cambridge University Press, Cambridge
    • Lawn, B., 1993, Fracture of Brittle Solids, 2nd ed., Cambridge University Press, Cambridge.
    • (1993) Fracture of Brittle Solids
    • Lawn, B.1
  • 15
    • 0017994716 scopus 로고
    • A general approach for the statistical analysis of multiaxial fracture
    • Evans, A. G., 1978, "A General Approach for the Statistical Analysis of Multiaxial Fracture," J. Am. Ceram. Soc., 61, pp. 302-308.
    • (1978) J. Am. Ceram. Soc. , vol.61 , pp. 302-308
    • Evans, A.G.1
  • 16
    • 0017945745 scopus 로고
    • Evaluation of a fundamental approach for the statistical analysis of fracture
    • Evans, A. G., and Jones, R. L., 1978, "Evaluation of a Fundamental Approach for the Statistical Analysis of Fracture," J. Am. Ceram. Soc., 61, pp. 157-160.
    • (1978) J. Am. Ceram. Soc. , vol.61 , pp. 157-160
    • Evans, A.G.1    Jones, R.L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.