Simulation-based study of MEMS X-ray optics for microanalysis

IEEE Journal of Quantum Electronics

Volumn 46, Issue 9, 2010, Pages 1295-1300

  Ezoe, Yuichiro ^a   Mitsuishi, Ikuyuki ^b,c   Takagi, Utako ^a   Ishizu, Kensuke ^a   Moriyama, Teppei ^a   Mitsuda, Kazuhisa ^b  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Micro analysis; microelectromechanical systems (MEMS); X ray

Indexed keywords

FINE FOCUS; INTENSITY GAIN; MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MICROPORES; RAY TRACING SIMULATION; SIDE WALLS; SIMULATION-BASED; X RAY MIRRORS;

MECHATRONICS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; PLASMA ETCHING; X RAY OPTICS; X RAYS;

COMPOSITE MICROMECHANICS;

EID: 77955152165     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/JQE.2010.2047380     Document Type: Article

References (6)

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3. X-Ray Optical Systems, Inc. (2010, Feb.) [Online]. Available: http://www.xos.com/ index.php
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5. I. Mitsuishi, Y. Ezoe, U. Takagi, T. Hayashi, T. Sato, K. N. K. Morishita, N. Y. Yamasaki, and K. Mitsuda, "Optical image analysis of the novel ultralight-weight and high-resolution MEMS x-ray optics," in Proc. IEEE/Lasers Electro-Optics Soc. (LEOS) Int. Conf. Opt. Microelectromech. Syst., 2009, pp. 123-124.
6. Y. Ezoe, I. Mitsuishi, U. Takagi, M. Koshiishi, K. Mitsuda, N. Y. Yamasaki, T. Ohashi, F. Kato, S. Sugiyama, R. E. Riveros, H. Yamaguchi, S. Fujihira, Y. Kanamori, K. Morishita, K. Nakajima, and R. Maeda, "Ultralight-weight and high-resolution x-ray mirrors using DRIE and xray LIGA techniques for space x-ray telescopes," Microsyst. Tech., DOI 10.1007s00542-009-0981-4.