Structural transformations of PZT 53/47 sol-gel films on different substrates driven by thermal treatments

Ferroelectrics

Volumn 396, Issue 1, 2010, Pages 49-59

  Bruno, Emanuela ^a   Ciuchi, Federica ^a   Castriota, Marco ^a   Marino, Salvatore ^a   Nicastro, Gaetano ^a   Cazzanelli, Enzo ^a   Scaramuzza, Nicola ^a  

^a UNIVERSITY OF CALABRIA   (Italy)

Author keywords

Atomic force microscopy (AFM); Electron microscopy; Ferroelectric properties; Interfaces; X ray diffraction

Indexed keywords

ANNEALING PROCESS; ANNEALING TEMPERATURES; ASYMMETRIC RESPONSE; ATOMIC FORCE MICROSCOPY (AFM); DIFFERENT SUBSTRATES; ELECTRICAL PROPERTY; FERROELECTRIC PEROVSKITES; FERROELECTRIC PROPERTY; FLOAT GLASS; INDUCED POLARIZATION; NANO SCALE; PBZR0.53TI0.47O3; PEROVSKITE PHASE; PZT; SEM; SI SUBSTRATES; SI WAFER; SOL-GEL SYNTHESIS; SOLGEL FILMS; STRUCTURAL EVOLUTION; STRUCTURAL TRANSFORMATION; THERMAL TREATMENT;

ANNEALING; ATOMIC FORCE MICROSCOPY; ATOMS; CRYSTAL ATOMIC STRUCTURE; ELECTRIC PROPERTIES; FERROELECTRICITY; GELS; ITO GLASS; OXIDE MINERALS; PEROVSKITE; POLARIZATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SOL-GEL PROCESS; SOL-GELS; SOLS; SPIN GLASS; SUBSTRATES; X RAY DIFFRACTION; X RAYS;

ELECTRIC FORCE MICROSCOPY;

EID: 77954972837     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150191003795189     Document Type: Article

References (10)

1. 3 bulk powders. Journal of Materials Research 7(9), 2546 (1992).
2. S. S. Dana, K. F. Etzold, and S. Clabes, Crystallization of sol-gel derived lead zirconate titanate thin films. Journal of Applied Physics 69, 4398 (1991).
3. Science and technology of Electroceramic Thin films (NATO/ARW Series E), edited by O. Auciello and R. Waser (Kluver, Deventer, 1994), vol. 284.
4. D. Damianovic, Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics, thesis, Swiss Federal Institute of technology-EPFL, Lausanne, Switzerland (1998).
5. S. Marino, M. Castriota, G. Strangi, E. Cazzanelli, and N. Scaramuzza, Asymmetric nematic liquid crystal cells containing lead zirconium titanate (PZT) films. Journal of Applied Physics 102, 013112 (2007).
6. E. Bruno, M. P. De Santo, M. Castriota, S. Marino, G. Strangi, E. Cazzanelli and N. Scaramuzza, Morphological and electrical investigations of lead zirconium titanate thin films obtained by sol-gel synthesis on indium tin oxide electrodes. Journal of Applied Physics 103, 1 (2008).
7. D. P. Birnie III, M. H. Jilavi, T. Krajewski, and R. Naß, The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon. Journal of Sol-Gel Science and Technology 13, 855-859 (1998).
8. Harold P. Klug and Leroy E. Alexander, X Ray diffraction procedures. John Wiley & sons, inc. 1970
9. G. Barucca, A. De Benedittis, A. Di Cristoforo, G. Majni, P. Mengucci, F. Leccabue, and B. E. Watts, Crystallization of perovskite PZT films on MgO substrates. Thin Solid Films 319, 207 (1998).
10. L'H. Famedi, M. Guilloux-Viry, A. Perrin, Z. Z. Li, and H. Raffy, Support-Promoted stabilization of the metastable PZT Pyrochlore phase by Epitaxial thin film growth. Journal of Solid State Chemistry 158, 40 (2001).