The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

Journal of Sol-Gel Science and Technology

Volumn 13, Issue 1-3, 1999, Pages 855-859

  Birnie III, D P ^a   Jilavi, M H ^a   Krajewski, T ^a   Nass R ^a  

^a INM LEIBNIZ INSTITUTE FOR NEW MATERIALS   (Germany)

Author keywords

Barrier layers; Crystallization; PZT

Indexed keywords

CRACK INITIATION; DIFFUSION; ENERGY DISPERSIVE SPECTROSCOPY; MICROSTRUCTURE; PEROVSKITE; PHASE TRANSITIONS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; COMPOSITION EFFECTS; CRYSTALLIZATION; HIGH RESOLUTION ELECTRON MICROSCOPY; INORGANIC COATINGS; LEAD COMPOUNDS; MICROANALYSIS; NANOSTRUCTURED MATERIALS; SILICON;

BARRIER LAYER COMPOSITION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); MICROCHEMICAL ANALYSIS; SILICON SUBSTRATES; BARRIER LAYERS; LEAD ZIRCONATE TITANATE;

CRYSTALLIZATION; DIELECTRIC FILMS;

EID: 0032308126     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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