Absolute surface metrology by differencing spatially shifted maps from a phase-shifting interferometer

Optics Letters

Volumn 35, Issue 14, 2010, Pages 2346-2348

  Bloemhof, E E ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIZEAU INTERFEROMETERS; LATERAL SHIFTS; ORTHOGONAL DIRECTIONS; PHASE-SHIFTING; PHASE-SHIFTING INTERFEROMETERS; PRECISION OPTICS; SPATIAL RESOLUTION; SURFACE HEIGHT; SURFACE METROLOGY; SURFACE UNDER TESTS; TRANSMISSION FLATS; WAVE FRONT RECONSTRUCTION;

INTERFEROMETERS; SPHERES; SURFACE MEASUREMENT;

SURFACE STRUCTURE;

EID: 77954972426     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.35.002346     Document Type: Article

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