Device architecture and precision nanofabrication of microring-resonator filter banks for integrated photonic systems

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 3, 2010, Pages 2044-2052

  Holzwarth, Charles W ^a   Khilo, Anatoly ^a   Dahlem, Marcus ^a   Popovic, Milos A ^a   Kärtner, Franz X ^a   Ippen, Eric P ^a   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Demultiplex; Electron Beam lithography; Microring resonator; Nanofabrication; Photonics

Indexed keywords

CHANNEL FILTERS; DEVICE ARCHITECTURES; DIMENSIONAL PRECISION; ELECTRONIC-PHOTONIC INTEGRATED CIRCUIT; FABRICATION METHOD; FABRICATION PROCESS; HIGH INDEX CONTRAST; INTEGRATED PHOTONIC SYSTEMS; LOW LOSS; MICRORING RESONATOR; MICRORINGS; NANOFABRICATION; POST-FABRICATION; PRECISION NANOFABRICATION; RESONANT FREQUENCIES; RESONATOR FILTERS; SECOND ORDERS; THERMAL TUNING;

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; FABRICATION; MICROWAVE FILTERS; MULTIPLEXING EQUIPMENT; NATURAL FREQUENCIES; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; SILICON NITRIDE;

FILTER BANKS;

EID: 77954967793     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2035     Document Type: Article

References (20)

1. F. X. Kärtner, R. Amatya, M. Aranghini, H. Byun, J. Chen, M. Dahlem, N. A. DiLello, F. Gan, C. W. Holzwarth, J. L. Hoyt, E. P. Ippen, A. Khilo, J. Kim, A. Motamedi, J. S. Orcutt, M. Park, M. Perrott, M. A. Popović, R. J. Ram, H. I. Smith, G. R. Zhou, S. J. Spector, T. M. Lyszczarz, M. W. Geis, D. M. Lennon, J. U. Yoon, M. E. Grein, and R. T. Schulein, Proceedings of the SPIE, 6898 (2008).
2. C. Batten, A. Joshi, J. S. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popović, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kärtner, R. J. Ram, V. Stojanović, and K. Asanović, IEEE Micro. 29 (2008).
3. C. Gunn, VLSI Technology, 2007 IEEE Symposium on, ICS Convention Design, Inc., Tokyo, Japan (2007).
4. Q. Xu, D. Fattal, and R. G. Beausoleil, Opt. Express 16 (2008).
5. B. E. Little, S. T. Chu, H. A. Haus, J. S. Foresi, and J.-P. Laine, J. Lightwave Technol. 15, 998 (1997).
6. M. A. Popović, C. Manolatou, and M. R. Watts, Opt. Express 14 (2006).
7. T. Barwicz, M. A. Popovic, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, J. Lightw. Technol. 24, 5 (2006).
8. J.-M. Lee, S. Park, and G. Kim, Optics Comm. 281, 17 (2008).
9. C. W. Holzwarth, T. Barwicz, M. A. Popović, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, J. Vac. Sci. Technol. B 24, 6 (2006).
10. S. Xiao, M. H. Khan, H. Shen, and M. Qi, Opt. Express 15, 7489 (2007).
11. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, Opt. Lett. 29, 2861 (2004).
12. S. Xiao, M. H. Khan, H. Shen, and M. Qi, Opt. Express 15, 14467 (2007).
13. B. E. Little, J.-P. Laine, and S. T. Chu, Opt. Lett. 22, 4 (1997).
14. W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, Opt. Express 15, 4 (2007).
15. C. W. Holzwarth, T. Barwicz, and H. I. Smith, J. Vac. Sci. Technol. B 25, 6 (2007).
16. T. Barwicz, C. W. Holzwarth, P. T. Rakich, M. A. Popović, E. P. Ippen, and H. I. Smith, Appl. Phys. Lett. 92, 131108 (2008).
17. W. Kern, Handbook of Semiconductor Wafer Cleaning Technology, edited by W. Kern, Noyes Publications, Berkshire (1993) p. 20.
18. C. Dix, P. G. Flavin, P. Hendy, and M. E. Jones, J. Vac. Sci. Technol. B 3, 1 (1985).
19. R. Amatya, C. W. Holzwarth, H. I. Smith, and R. J. Ram, Phot. Technol. Lett. IEEE 20, 20 (2008).
20. F. Gan, T. Barwicz, M. A. Popović, M. S. Dahlem, C. W. Holzwarth, P. T. Rakich, H. I. Smith, E. P. Ippen, and F. X. Kärtner, IEEE/LEOS Photonics in Switching Conference, Paper TuB3.3., San Francisco, CA (2007).