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Beam broadening is often implicitly neglected but makes a significant contribution to the size of the STEM probe. Just noting the nominal beam diameter impinging on the sample leads to a serious under estimation of the actual spatial resolution in STEM EELS.
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To obtain this figure, several data treatment steps were needed: a background extrapolation, cross correlation to remove energy drift, Gaussian smoothing with a FWHM = 0.5 eV to improve the signal-to-noise ratio. For the single interface sample, the interface signal is taken as the sum of three spectra near the interface over a distance of 0.6 nm. For the multilayer sample, a sum of two spectra taken at the first and second n - type interface and at the first and second p -type interface is taken after checking that the trend in the first and second interface was identical.
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