9.4: MEMS fabrication of 0.22 THz sheet beam TWT circuit

2010 IEEE International Vacuum Electronics Conference, IVEC 2010

Volumn , Issue , 2010, Pages 185-186

  Shin, Young Min ^a   Baig, Anisullah ^a   Gamzina, Diana ^a   Luhmann Jr , Neville C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

KMPR; LIGA; MEMS; Sheet beam; Submillimeter; THz; TWTA

Indexed keywords

CNC MACHINING; DIMENSIONAL TOLERANCE; DISPERSION PROPERTIES; EIGEN MODES; FABRICATION TOLERANCES; MEMS FABRICATION; MICROELECTROMECHANICAL SYSTEMS; OPERATION MODE; PROCESS CONDITION; SHEET BEAM; SHEET BEAM TRAVELING WAVE TUBE; SUBMILLIMETERS; TE MODE; TEST RESULTS; TRANSIENT SIMULATION; UV LIGA;

ATOMIC FORCE MICROSCOPY; FABRICATION; FITS AND TOLERANCES; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TERAHERTZ WAVES; TRAVELING WAVE TUBES; VACUUM; VACUUM TECHNOLOGY;

ELECTRIC NETWORK ANALYSIS;

EID: 77954840651     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVELEC.2010.5503542     Document Type: Conference Paper

References (4)

1. Y.-M. Shin and L. R. Barnett, Appl. Phys. Lett. 92, 091501 (2008)
2. Y.-M. Shin, L. R. Barnett, and N. C. Luhmann, Jr., Appl. Phys. Lett. 93, 221504 (2008)
3. Young-Min Shin, Larry R. Barnett, and Neville. C. Luhmann. Jr., IEEE Trans. Elec. Dev. 56, 706 (2009)
4. Y. -M. Shin, L. R. Barnett, D. Gamzina, N. C. Luhmann Jr., M. Field, R. Borwick, Appl. Phys. Lett. 95, 181505 (2009)