Influence of the morphology of platinum combined with β-Ga 2O3 on the VOC response of work function type sensors

Sensors and Actuators, B: Chemical

Volumn 148, Issue 2, 2010, Pages 439-449

  Stegmeier, S ^a   Fleischer, M ^a   Hauptmann, P ^b  

^a SIEMENS AG   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Ga2O3; Activation; FGFET; Kelvin probe; Platinum; Room temperature; VOC detection

Indexed keywords

FLOATING GATES; KELVIN PROBE; NANO SCALE; OXYGEN SPECIES; POLYCRYSTALLINE; PT CLUSTERS; REDUCING GAS; ROOM TEMPERATURE; ROOM-TEMPERATURE OPERATION; SENSING LAYERS; SENSING MECHANISM; SMALL CONCENTRATION; THERMAL ACTIVATION; VOC (VOLATILE ORGANIC COMPOUNDS);

ALDEHYDES; ESTERS; HYDROCARBONS; KETONES; OXYGEN; PLATINUM; PROBES; SENSORS; SURFACE PROPERTIES; THICK FILMS; VOLATILE ORGANIC COMPOUNDS; WORK FUNCTION;

PLATINUM COMPOUNDS;

EID: 77954670805     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.05.030     Document Type: Article

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