Hollow ARROW waveguides on self-aligned pedestals for improved geometry and transmission

IEEE Photonics Technology Letters

Volumn 22, Issue 15, 2010, Pages 1147-1149

  Lunt, Evan J ^a   Wu, Bin ^b   Keeley, Jared M ^a   Measor, Philip ^b   Schmidt, Holger ^b   Hawkins, Aaron R ^a  

^a Department of Electrical and Computer Engineering   (United States)

^b University of California Santa Cruz   (United States)

Author keywords

Fabrication; optical waveguides; plasma materials processing applications

Indexed keywords

AIR-CORE; ANISOTROPIC PLASMA ETCHING; ANTIRESONANT REFLECTING OPTICAL WAVEGUIDES; ARROW WAVEGUIDES; FABRICATION PROCESS; FABRICATION YIELD; HOLLOW CORES; HOLLOW WAVEGUIDES; NEW DESIGN; NONIDEAL; NONUNIFORM; PLASMA MATERIALS-PROCESSING APPLICATIONS; SELF-ALIGNED; SILICON SUBSTRATES; UNIFORM LAYER; WAVEGUIDE LOSS;

FABRICATION; OPTICAL WAVEGUIDES; PLASMA ETCHING;

WAVEGUIDES;

EID: 77954597390     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2010.2051145     Document Type: Article

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