SCOPUS 정보 검색 플랫폼

Volumn 96, Issue 25, 2010, Pages

Rigorous extraction tunability of Si-integrated Ba0.3 Sr 0.7 TiO3 thin film up to 60 GHz

(7) Ponchel, Freddy a Legier, Jean Faņois b Soyer, Caroline b Ŕmiens, Denis b Midy, Jean a Lasri, Tuami b Gúguan, Guillaume a

a STMICROELECTRONICS (France)

b INSTITUT D ELECTRONIQUE (France)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; FINITE ELEMENT ANALYSIS; FREQUENCY LOSS; HIGH RESISTIVITY SILICON; IMPEDANCE MATCHINGS; IN-SITU; LOSS TANGENT; QUARTER WAVELENGTH TRANSFORMER; RADIO FREQUENCY MAGNETRON SPUTTERING; SLOT WIDTH; TIO; TUNABILITIES;

BARIUM; COPLANAR WAVEGUIDES; DIELECTRIC LOSSES; ELECTRIC FIELD MEASUREMENT; ELECTRIC FIELDS; FERROELECTRIC FILMS; FINITE ELEMENT METHOD; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77954063261 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3454772 Document Type: Article

Times cited : (20)

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