Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface

Guangxue Xuebao/Acta Optica Sinica

Volumn 27, Issue 6, 2007, Pages 1031-1038

  Yang, Yongying ^a   Lu, Chunhua ^a   Liang, Jiao ^a   Liu, Dong ^a   Yang, Liming ^b   Li, Ruijie ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Microscopic scattering imaging; Morphology; Optical measurement; Surface defect

Indexed keywords

DIGITAL IMAGE BINARY PROCESSING; MICROSCOPIC SCATTERING IMAGING; OPTICAL MEASUREMENT;

IMAGE PROCESSING; IMAGING TECHNIQUES; LIGHT SOURCES; MORPHOLOGY; OPTICAL DEVICES; OPTICAL FIBERS; OPTICAL SYSTEMS; SURFACE DEFECTS; TEMPLATE MATCHING; TWO DIMENSIONAL;

LIGHT MEASUREMENT;

EID: 34447336937     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. Wang Fengquan, Yang Yongying, Sun Dandan et al.. Digital realization of precision surface defect evaluation system [C]. Proc. SPIE, 2005, 6150: 61500F-1-61500F-5
2. Sun Dandan, Yang Yongying, Wang Fengquan et al.. Microscopic scattering imaging system of defects on ultra-smooth surface suitable for digital image processing [C]. Proc. SPIE, 2005, 6150: 6150012-1-6150012-6
3. Dai Mingkui, Xu Deyan. The present situation of imperfection testing and research on the optical component [J]. Optical Instruments, 1996, 18 (3): 33-39 (in Chinese)
4. M. Born, E. Wolf. Principles of Optics [M]. 7th Edition, Cambridge: Cambridge University Press, 1999. 695-734
5. Qu Xinghua, He Ying, Han Feng et al.. IIlumination system for detecting random defects on strongly reflective and complex surfaces [J]. Acta Optica Sinca, 2003, 23 (5): 547-551 (in Chinese)
6. Li Ziqin, Wang Qian. Edge similar degree and its application in the comparison of suppressing speckle noise algorithm [J]. Chin. J. Lasers, 2002, 33 (5): 655-658 (in Chinese)
7. Di Hui, Yu Qifeng, Zhang Xiaohu. An algorithm for infrared image enhancement based on gray scale transform [J]. J. Applied Optic, 2006, 27 (2): 12-14 (in Chinese)
8. Li Zhigang, Ji Yubo, Xue Quan. A fast stitching algorithm for edge overlapping images [J]. Computer Engng., 2000, 26 (5): 37-38 (in Chinese)
9. Zhong Li, Hu Xiaofeng. Stitching algorithm for overlapping images [J]. J. Image and Graphics, 1998, 3 (5): 368-370 (in Chinese)
10. Cheng Weiming, Chen Mingyi, Ding Zheng et al.. Fringe-pattem connection method for shape measurement of 3-D large object [J]. Acta Optica Sinica, 1998, 18 (1): 74-79 (in Chinese)
11. Hui Jianjiang, Liu Zhaohui, Liu Wen. Application of mathematical morphology on infrared Image of multi-dim-small target [J]. Acta Photonica Sinca, 2006, 35 (4): 626-629 (in Chinese)
12. Yuan Huijing, Wang Yongtian. A new denoising method for small target detection [J]. Acta Photonica Sinca, 2004, 33 (5): 609-612 (in Chinese)