High quantum efficiency annular backside silicon photodiodes for reflectance pulse oximetry in wearable wireless body sensors

Journal of Micromechanics and Microengineering

Volumn 20, Issue 7, 2010, Pages

  Duun, Sune ^a   Haahr, Rasmus G ^a   Hansen, Ole ^a   Birkelund, Karen ^a   Thomsen, Erik V ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE PATCHES; D-RINGS; DEEP REACTIVE ION ETCH; HIGH QUANTUM EFFICIENCY; LONG TERM MONITORING; METALLIZATIONS; OPTICAL POWER; POWER CONSUMPTION; PULSE OXIMETRY; REFLECTANCE PULSE OXIMETRY; SENSOR SYSTEMS; SILICON PHOTODIODE; SURFACE MOUNTING TECHNOLOGIES;

BORON; ELECTRONIC EQUIPMENT MANUFACTURE; NONINVASIVE MEDICAL PROCEDURES; OPTIMIZATION; OXIMETERS; PHOTODIODES; REFLECTION; SENSORS; SILICON NITRIDE; TWO DIMENSIONAL;

QUANTUM EFFICIENCY;

EID: 77953900841     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/7/075020     Document Type: Article

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