A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2010, Pages 48-51

  Martin Fernandez, I ^a   Sansa, M ^a   Perez Murano, F ^a   Godignon, P ^a   Lora Tamayo, E ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Batch fabrication; Carbon nanotube transistors; CNT FET; Testing

Indexed keywords

BATCH FABRICATION; CARBON NANOTUBE TRANSISTORS; DEVICE FABRICATIONS; ELECTRIC CHARACTERISTICS; SINGLE-WALLED CARBON NANOTUBE FIELD EFFECT TRANSISTORS; STATISTICAL ANALYSIS; TEST VEHICLE; TWO-STEP PROCEDURE;

AUTOMATIC TESTING; CARBON NANOTUBES; FABRICATION; MESFET DEVICES; MICROELECTRONICS; SINGLE-WALLED CARBON NANOTUBES (SWCN);

FIELD EFFECT TRANSISTORS;

EID: 77953890055     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2010.5466860     Document Type: Conference Paper

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