Effect of nano-ni catalyst on the growth and characterization of diamond films by HFCVD

Journal of Nanomaterials

Volumn 2010, Issue , 2010, Pages

  Lin, Chhiu Tsu ^a   Teng, Chien Chung ^a   Ku, Feng Chi ^b   Sung, Chien Min ^b   Deng, Jin Pei ^c   Chien, Su Fang ^c   Song, Shin Min ^a  

^a NORTHERN ILLINOIS UNIVERSITY   (United States)

^b Department Kinik Company ^*  (Taiwan)

^c TAMKANG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AMORPHOUS CARBON LAYER; CRYSTALLINITIES; DIAMOND CRYSTALS; DIAMOND POWDERS; HOT FILAMENT CVD; NANO DIAMOND; NANOCATALYSTS; NI CATALYSTS; NUCLEATION AND GROWTH; SEM; SI SUBSTRATES; SI WAFER; SPHERICAL DIAMOND; TEM; TRANS-POLYACETYLENE; XPS; XRD;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; CATALYSTS; COALESCENCE; CRYSTALS; DIAMONDS; FILM GROWTH; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE ROUGHNESS;

DIAMOND FILMS;

EID: 77953481967     PISSN: 16874110     EISSN: 16874129     Source Type: Journal    
DOI: 10.1155/2010/365614     Document Type: Article

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