High Resolution and Differential PIXE combined with RBS, EBS and AFM analysis of magnesium titanate (MgTiO3) multilayer structures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 11-12, 2010, Pages 1980-1985

  Reis, M A ^a,b   Alves, L C ^a,b   Barradas, N P ^a,b   Chaves, P C ^a,b   Nunes, B ^a   Taborda, A ^a,b   Surendran, K P ^c   Wu, A ^c   Vilarinho, P M ^c   Alves, E ^a,b  

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b UNIVERSITY OF LISBON   (Portugal)

^c UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

Differential PIXE; Magnesium titanate; Microcalorimeter EDS X ray detection; RBS PIXE

Indexed keywords

AFM; CLADDING LAYER; COMPLEX PROBLEMS; DEPTH PROFILE; DIFFERENTIAL PIXE; ELASTIC BACKSCATTERING; EXPERIMENTAL PROCEDURE; HIGH RESOLUTION; HOLISTIC APPROACH; INTER-DIFFUSION; MAGNESIUM TITANATES; MICROCALORIMETER; MULTILAYER STRUCTURES; RUTHERFORD BACK-SCATTERING; SI SUBSTRATES; SRTIO; STRUCTURAL CHARACTERIZATION; X-RAY DETECTIONS;

ATOMIC FORCE MICROSCOPY; FILM PREPARATION; MAGNESIUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS;

BACKSCATTERING;

EID: 77953139296     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.02.113     Document Type: Article

References (12)

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