Thin film depth profiling using simultaneous particle backscattering and nuclear resonance profiling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 11-12, 2010, Pages 1829-1832

  Barradas, N P ^a,b   Mateus, R ^c   Fonseca, M ^b   Reis, M A ^b   Lorenz, K ^a,b   Vickridge, I ^d  

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^c INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^d INSTITUT DES NANOSCIENCES DE PARIS   (France)

Author keywords

NDF; NRP; PIGE; RBS

Indexed keywords

BEAM ENERGIES; DEPTH PROFILE; DIFFERENTIAL CROSS-SECTIONS; ELASTIC BACKSCATTERING; ENERGY LOSS; HIGH RESOLUTION; ION BEAM ANALYSIS; NARROW RESONANCES; NUCLEAR RESONANCE PROFILING;

BACKSCATTERING; COMPUTER SIMULATION; ENERGY DISSIPATION; GAMMA RAYS; RESONANCE; STOCHASTIC MODELS;

DEPTH PROFILING;

EID: 77953128092     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.02.092     Document Type: Article

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