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Volumn 28, Issue 3, 2010, Pages
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Modulated beam mass spectrometer studies of a Mark v Veeco cracker
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Author keywords
[No Author keywords available]
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Indexed keywords
ARSENIC;
CRACKS;
DIMERS;
GALLIUM ARSENIDE;
IONIZATION OF GASES;
MASS SPECTROMETERS;
MOLECULAR BEAM EPITAXY;
MOLECULAR BEAMS;
BACKGROUND GAS;
CRYOPANELS;
DEVICE PERFORMANCE;
KNUDSEN;
LINE OF SIGHT;
LINES-OF-SIGHT;
MODULATED BEAMS;
MOLECULAR-BEAM EPITAXY;
ULTRAHIGH VACUUM SYSTEM;
VOLATILE SPECIES;
III-V SEMICONDUCTORS;
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EID: 77952979258
PISSN: 21662746
EISSN: 21662754
Source Type: Journal
DOI: 10.1116/1.3368573 Document Type: Conference Paper |
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Times cited : (7)
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References (5)
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