Deconstructing energy use in microelectronics manufacturing: An experimental case study of a MEMS fabrication facility

Environmental Science and Technology

Volumn 44, Issue 11, 2010, Pages 4295-4301

  Branham, Matthew S ^a   Gutowski, Timothy G ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG DEVICES; DIFFERENT LENGTH SCALE; ENERGY DEMANDS; ENERGY INTENSITY; ENERGY USE; MEMS FABRICATION; MEMSDEVICES; MICROELECTRONICS MANUFACTURING; MICROMACHINED; PER UNIT; PROCESS ANALYSIS; SEMICONDUCTOR MANUFACTURING; SUPPORT EQUIPMENTS; TOPDOWN; TOTAL ENERGY REQUIREMENT;

ENERGY MANAGEMENT; MICROELECTRONIC PROCESSING; MICROELECTRONICS; SEMICONDUCTOR DEVICES;

FABRICATION;

ELECTRONIC EQUIPMENT; ELECTRONICS INDUSTRY; ENERGY USE; EXPERIMENTAL STUDY; MANUFACTURING; PROCESSING;

ARTICLE; ENERGY RESOURCE; EQUIPMENT; MICROELECTROMECHANICAL SYSTEM; POWER SUPPLY; SEMICONDUCTOR;

ELECTRONICS; MANUFACTURED MATERIALS; SEMICONDUCTORS;

EID: 77952918337     PISSN: 0013936X     EISSN: 15205851     Source Type: Journal    
DOI: 10.1021/es902388b     Document Type: Article

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