Micromachined passive magnetostatic relays for portable applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 779-782

  Tang, Min ^a   Liao, Ebin ^a   Kuo JK, Cheng Cheng ^a   Lee, Dayong ^a   Kumar, Rakesh ^a   Lee, Yong Hean ^a   Shankar, Ravi ^b   Neel, Olivier Le ^b   Noviello, Giuseppe ^b   Italia, Francesco ^b  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b STMICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR PHONE; ELECTROPLATED NI; GOLD CONTACTS; LIFETIME TESTING; MAGNETIC LAYERS; MICROMACHINED; PERSONAL DATA ASSISTANTS; PORTABLE APPLICATIONS; PORTABLE ELECTRONICS; SWITCHING CYCLES; TORSION BAR;

HEARING AIDS; MAGNETIC FIELDS; MAGNETOSTATICS; MECHANICS; REACTIVE ION ETCHING;

MECHANICAL ENGINEERING;

EID: 77952773756     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442292     Document Type: Conference Paper

References (6)

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5. G. D. Gray and P. A. Kohl, "Modeling and performance of a magnetic MEMS wiping actuator," IEEE J. Microelectromech. Syst., vol. 5, no. 4, pp. 904-911, 2006.
6. J. A. Osborn, "Demagnetizing factors of the general ellipsoid," Phys. Rev., vol. 67, no. 11&12, pp. 351-357, 1945.