Design and fabrication of flexible neural microprobe for three dimensional assembly

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 1003-1006

  Chuang, Shih Chang ^a   Chen, Chang Hsiao ^a   Su, Huan Chieh ^a   Yeh, Shih Rung ^a   Yao, Da Jeng ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

3D PROBE; ARBITRARY ORIENTATION; CHRONIC INFLAMMATION; COOPERATIVE ACTIVITY; ELECTROSTATIC ACTUATION; ESCAPE SYSTEM; MATERIAL FRACTURE; MICRO-PROBES; NEURAL SIGNALS; PARYLENES; THREE-DIMENSIONAL (3D); THREE-DIMENSIONAL ASSEMBLY;

ELECTROSTATIC ACTUATORS; FABRICATION; MECHANICAL ENGINEERING; MECHANICS; PROBES; REACTIVE ION ETCHING;

THREE DIMENSIONAL;

EID: 77952769893     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442378     Document Type: Conference Paper

References (8)

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