Understanding and control of unstable contact resistance in RF MEMS gold-gold direct contact switches

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 771-774

  Chow, Linda L W ^a,b   Kurabayashi, Katsuo ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT CURRENTS; CONTACT SWITCHES; DEVICE FAILURES; DIRECT CONTACT; LOW POWER; MEMS SWITCHES; RF-MEMS; RF-MEMS SWITCHES;

CONTACT RESISTANCE; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING;

ELECTRIC SWITCHES;

EID: 77952766574     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442294     Document Type: Conference Paper

References (12)

1. P. Gammel, G. Fisher, and J. Bouchaud, "RF. MEMS and NEMS Technology, Devices, and. Applications", Bell Labs Technical Journal, vol. 10(3), pp. 29-59, 2005
2. G. M. Rebeiz, RF MEMS Theory, Design, and Technology, New Jersey: Wiley, 2003
3. D. Hyman and M. Mehregany, "Contact physics of gold microcontacts for MEMS switches", IEEE Trans. Comp. Packag. Technol., vol. 22(3), pp. 357-364, 1999
4. S. Majumdar, N. E. McGruer, G. G. Adams, P. M. Zavracky, R. H. Morrison, and J. Krim, "Study of contacts in an electrostatically actuated microswitch", Sensors & Actuators A, vol. 93, pp. 19-26, 2001
5. J. Schimkat, "Contact materials for microrelays", 11th IEEE Int. Conf. on Microelectromech. Syst., 1998, pp. 190-194
6. R. A. Jr. Coutu, P. E. Kladitis, K. D. Leedy, and R. L Crane, "Selecting Metal Alloy Electric Contact Materials for MEMS Switches", J. Micromechanics and Microengineering, vol. 14(8), pp. 1157-1164, 2004
7. S. C. Bromley and B. J. Nelson, "Performance of microcontacts tested with a novel MEMS device", Proc. 47th IEEE Holm Conf. Electrical Contacts, 2001, pp. 122-127
8. J. DeNatale, "Reconfigurable RF circuits based on integrated. MEMS switches," IEEE Int. Solid-State Circuits Conf., 2004, pp. 310-311
9. R. Holm, Electric Contacts - Theory and Applications, Berlin: Springer-Verlag, 1967
10. B. D. Jensen, L. L. W. Chow, K. Huang, K. Saitou, J. L. Volakis, and K. Kurabayashi, "Effect of Nanoscale Heating on Electrical Transport in RF MEMS Switch Contacts", J. Microelectromech. Syst., 14(5), pp. 935-946, 2005
11. L.L.W. Chow, J.L. Volakis, K. Saitou, and K. Kurabayashi, "Lifetime Extension of RF MEMS Direct Contact Switches in Hot Switching Operations by Ball Grid Array Dimple Design," IEEE Electron Device Lett., vol. 28(6), pp. 479-481, 2007
12. G. Wexler, " The size effect and the non-local Boltzmann transport equation in orifce and disk geometry", Proc. Phys. Soc., vol. 89, pp. 917-924, 1996