Cracking pressure control of parylene checkvalve using slanted tensile tethers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 1107-1110

  Lin, Jeffrey Chun Hui ^a   Yu, Feiqiao ^a   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; MECHANICS; MEMS; TETHERLINES;

CHECK VALVES; CRACKING PRESSURES; FLOW DIRECTION; GRAY SCALE MASK; MICRO FLUIDIC APPLICATIONS; MICRO-MACHINED; PARYLENES; PRESSURE FLOW; PRESSURE PROFILES; RESIDUAL THERMAL STRESS;

PHOTORESISTS;

EID: 77952755041     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442404     Document Type: Conference Paper

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