Light-actuated digital microfluidics for large-scale, parallel manipulation of arbitrarily sized droplets

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 252-255

  Pei, Shao Ning ^a   Valley, Justin K ^a   Neale, Steven L ^a   Jamshidi, Arash ^a   Hsu, Hsan Yin ^a   Wu, Ming C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGGRESSIVE SCALING; ALD DIELECTRIC; DATA PROJECTORS; DEVICE RELIABILITY; DIELECTRIC THICKNESS; DIGITAL MICROFLUIDICS; DIGITAL MICROFLUIDICS DEVICES; HIGH QUALITY; ON-DEMAND; OPTICAL POWER; PARALLEL MANIPULATIONS;

MECHANICAL ENGINEERING; MECHANICS; MICROFLUIDICS; REACTIVE ION ETCHING;

DROP FORMATION;

EID: 77952754493     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442519     Document Type: Conference Paper

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