Thin Film Formation by using New Facing Targets Sputtering Apparatus

Shinku/Journal of the Vacuum Society of Japan

Volumn 44, Issue 9, 2001, Pages 808-814

  Kadokura, Sadao ^a  

^a FTS Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77952724773     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.44.808     Document Type: Article

References (7)

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4. S. Kadokura and M. Naoe: Mat. Res. Soc. Symp. Proc. Vol. 239, (1992) pp. 653-658.
5. M. Naoe and S. Kadokura: J.M.M.M 193 (1999) pp. 185-191.
6. ASET (2000) pp. 23-35.
7. S. Kadokura and M. Naoe: IEEE Trans. Mag. Vol. 32 (1996) pp. 3816-3818.