Optimal device structure for pipe-shaped BiCS flash memory for ultra high density storage device with excellent performance and reliability

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2009, Pages

  Ishiduki, Megumi ^a   Fukuzumi, Yoshiaki ^a   Katsumata, Ryota ^a   Kito, Masaru ^a   Kido, Masaru ^a   Tanaka, Hiroyasu ^a   Komori, Yosuke ^a   Nagata, Yuzo ^a,b   Fujiwara, Tomoko ^a   Maeda, Takashi ^a   Mikajiri, Yoshimasa ^a   Oota, Shigeto ^a   Honda, Makoto ^a   Iwata, Yoshihisa ^a   Kirisawa, Ryouhei ^a   Aochi, Hideaki ^a   Nitayama, Akihiro ^a  

^a TOSHIBA CORPORATION   (Japan)

^b Toshiba Information Systems (Japan) Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIT COST; CONTROL GATES; DATA STORAGE DEVICES; EXCELLENT PERFORMANCE; OPTIMAL DEVICES; SELECT GATE; STORAGE DEVICES; ULTRAHIGH DENSITY;

ELECTRON DEVICES; PIPE;

FLASH MEMORY;

EID: 77952413372     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2009.5424261     Document Type: Conference Paper

References (4)

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3. Y.Komori,et al.,IEDM Tech.Dig.,pp.851-854,2008.
4. R.Katsumata,et al.,Symp.on VLSI Tech.,pp.136-137,2009.