Deposition of polymer barrier materials by resonant infrared pulsed laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7585, Issue , 2010, Pages

  Avanesyan, S M ^a   Halabica, A ^a   Johnson, S L ^a   Kelley, M J ^c,d   Klopf, J M ^d   Park, H K ^b   Schriver, K E ^a   Singaravelu, S ^d,e   Haglund Jr , R F ^a  

^a VANDERBILT UNIVERSITY   (United States)

^b AppliFlex LLC   (United States)

^c Dept of Economics and Thomas Jefferson Program in Public Policy at the College of William and Mary   (United States)

^d THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY   (United States)

^e OLD DOMINION UNIVERSITY   (United States)

Author keywords

Barrier layers; Free electron laser; Optical parametric oscillator; Pulsed laser deposition; Resonant infrared

Indexed keywords

BARRIER LAYERS; BARRIER MATERIAL; CYCLIC OLEFIN COPOLYMERS; FILM DEPOSITION; INFRARED LASER ABLATION; LOW-TEMPERATURE PROCESS; PICOSECONDS; POLY(ETHYLENEDIOXYTHIOPHENE); PROTECTIVE LAYERS; PROTECTIVE MATERIALS; PULSED LASER ABLATION;

DEPOSITION; ELECTRONS; ETHYLENE; FREE ELECTRON LASERS; INFRARED LASERS; INFRARED SPECTROSCOPY; LASER ABLATION; LASER APPLICATIONS; LASERS; LIGHT EMITTING DIODES; OPTICAL FREQUENCY CONVERSION; OPTICAL PARAMETRIC OSCILLATORS; OPTICAL PROPERTIES; ORGANIC LIGHT EMITTING DIODES (OLED); PARAMETRIC OSCILLATORS; POLYSTYRENES; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY;

PULSED LASERS;

EID: 77951744964     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.846417     Document Type: Conference Paper

References (21)

1. D. M. Bubb and R. F. Haglund, "Resonant Infrared Pulsed Laser Ablation and Deposition of Thin Polymer Films," in Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials, R. Eason, ed. (John Wiley and Sons, Inc., New York, 2006), pp. 35-61.
2. D. M. Bubb, J. S. Horwitz, J. H. Callahan, R. A. McGill, E. J. Houser, D. B. Chrisey, M. R. Papantonakis, R. F. Haglund, M. C. Galicia, and A. Vertes, "Resonant infrared pulsed-laser deposition of polymer films using a free-electron laser," Journal of Vacuum Science & Technology A-an International Journal Devoted to Vacuum Surfaces and Films 19(5), 2698-2702 (2001).
3. M. R. Papantonakis and R. F. Haglund, "Picosecond pulsed laser deposition at high vibrational excitation density: the case of poly(tetrafluoroethylene)," Applied Physics a-Materials Science & Processing 79(7), 1687-1694 (2004).
4. N. L. Dygert, A. P. Gies, K. E. Schriver, and R. F. Haglund, "Deposition of polyimide precursor by resonant infrared laser ablation," Applied Physics A-Materials Science & Processing 89(2), 481-487 (2007).
5. M. R. Papantonakis, E. Herz, D. L. Simonsen, U. B. Wiesner, and R. F. Haglund, Jr., "Deposition of functionalized nanoparticles in multilayer thin-fim structures by resonant infrared laser radiation," in Laser-based Micro- and Nanopackaging and Assembly, eds. W. Pfleging, Y. Lu, K. Washio, F. G. Bachmann and W. Hoving, Proceedings of SPIE 6459, 64590X (2007).
6. E. G. Gamaly, A. V. Rode, and B. Luther-Davies, "Ultrafast ablation with high-pulse-rate lasers. Part I: Theoretical considerations," Journal of Applied Physics 85(8), 4213-4221 (1999).
7. S. L. Johnson, D. M. Bubb, and R. F. Haglund, "Phase explosion and recoil-induced ejection in resonant-infrared laser ablation of polystyrene," Applied Physics A-Materials Science & Processing 96(3), 627-635 (2009).
8. S. L. Johnson, D. M. Bubb, K. E. Schriver, and R. F. J. Haglund, "Effects of the absorption coefficient on resonant infrared laser ablation of poly(ethylene glycol)," Journal of Applied Physics 105, 024901. (2009).
9. G. S. Edwards, D. Evertson, W. Gabella, R. Grant, T. L. King, J. Kozub, M. Mendenhall, J. Shen, R. Shores, S. Storms, and R. H. Traeger, "Free-electron lasers: Reliability, performance, and beam delivery," Ieee Journal of Selected Topics in Quantum Electronics 2(4), 810-817 (1996).
10. 1A. P. Ghosh, L. J. Gerenser, C. M. Jarman, and J. E. Fornalik, "Thin-film encapsulation of organic light-emitting devices," Applied Physics Letters 86(22), 223503 (2005).
11. U. Keller, "Recent developments in compact ultrafast lasers," Nature 424(6950), 831-838 (2003).
12. S. V. Marchese, C. R. E. Baer, A. G. Engqvist, S. Hashimoto, D. Maas, M. Golling, T. Sudmeyer, and U. Keller, "Femtosecond thin disk laser oscillator with pulse energy beyond the 10-microjoule level," Optics Express 16(9), 6397-6407 (2008).
13. T. Sudmeyer, S. V. Marchese, S. Hashimoto, C. R. E. Baer, G. Gingras, B. Witzel, and U. Keller, "Femtosecond laser oscillators for high-field science," Nature Photonics 2(10), 599-604 (2008).
14. P. Russbueldt, T. Mans, G. Rotarius, J. Weitenberg, H. D. Hoffmann, and R. Poprawe, "400 W Yb:YAG Innoslab fs-amplifier," Optics Express 17(15), 12230-12245 (2009).
15. V. Z. Kolev, M. W. Duering, B. Luther-Davies, and A. V. Rode, "Compact high-power optical source for resonant infrared pulsed laser ablation and deposition of polymer materials," Optics Express 14(25), 12302-12309 (2006).
16. N. Hempler, J. M. Hopkins, B. Rosener, M. Rattunde, J. Wagner, V. V. Fedorov, I. S. Moskalev, S. B. Mirov, and D. Burns, "Semiconductor disk laser pumped Cr2+:Znse lasers," Optics Express 17(20), 18136-18141 (2009).
17. I. S. Moskalev, V. V. Fedorov, and S. B. Mirov, "Tunable, single-frequency, and multi-watt continuous-wave Cr2+: ZnSe lasers," Optics Express 16(6), 4145-4153 (2008).
18. F. Haxsen, A. Ruehl, M. Engelbrecht, D. Wandt, U. Morgner, and D. Kracht, "Stretched-pulse operation of a thulium-doped fiber laser," Optics Express 16(25), 20471-20476 (2008).
19. G. Imeshev, M. E. Fermann, K. L. Vodopyanov, M. M. Fejer, X. Yu, J. S. Harris, D. Bliss, and C. Lynch, "High-power source of THz radiation based on orientation-patterned GaAs pumped by a fiber laser," Optics Express 14(10), 4439-4444 (2006).
20. L. Pearson, J. W. Kim, Z. Zhang, M. Ibsen, J. K. Sahu, and W. A. Clarkson, "High-power linearly-polarized single-frequency thulium-doped fiber master-oscillator power-amplifier," Optics Express 18(2), 1607-1612.
21. K. L. Vodopyanov, "Optical generation of narrow-band terahertz packets in periodically-inverted electro-optic crystals: conversion efficiency and optimal laser pulse format," Optics Express 14(6), 2263-2276 (2006).