Control and optimization of thermal oxidation processes for industrial solar cell fabrication

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2009, Pages 001024-001028

  Mack, Sebastian ^a   Lemke, Anke ^a   Wolf, Andreas ^a   Holzinger, Benedikt ^a   Zimmer, Martin ^a   Biro, Daniel ^a   Preu, Ralf ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL AND OPTIMIZATION; CONTROL PROCEDURES; ETCHED SURFACE; FORMING GAS; INDUSTRIAL SOLAR CELLS; INTEGRATED PROCESS; MINORITY CARRIER LIFETIMES; OPTIMIZED PROCESS; P-TYPE; PRODUCTION LINE; SURFACE RECOMBINATION VELOCITIES; SYSTEMATIC PROCESS; THERMAL OXIDATION; THERMAL OXIDATION PROCESS; WET CHEMICAL PROCESSING; WET CHEMICALS;

CARRIER LIFETIME; CHEMICAL CLEANING; OPTIMIZATION; OXIDATION; OXIDATION RESISTANCE;

PROCESS CONTROL;

EID: 77951599045     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2009.5411196     Document Type: Conference Paper

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