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Volumn 3, Issue 1, 2010, Pages 343-350
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Phonon attenuation in the GHz regime: Measurements and simulations with a visco-elastic material model
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Author keywords
Bulk acoustic waves; Laser acoustics; Phonon attenuation; Thin film metrology; Wave propagation
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Indexed keywords
ACOUSTIC WAVE PROPAGATION;
ACOUSTIC WAVES;
ACOUSTICS;
ALUMINUM;
ELASTIC WAVES;
INFRARED DEVICES;
INFRARED LASERS;
LASER EXCITATION;
LASER PULSES;
METALLIC FILMS;
NANOIMPRINT LITHOGRAPHY;
OPTICAL PUMPING;
PHONONS;
POLYMETHYL METHACRYLATES;
PROBES;
PUMPING (LASER);
SAPPHIRE;
SILICON WAFERS;
TRANSDUCERS;
ULTRASONIC TESTING;
WAVE PROPAGATION;
BULK ACOUSTIC WAVES;
LASER-ACOUSTICS;
NEAR-INFRARED LASERS;
NON-DESTRUCTIVE MEASUREMENT;
PHOTOACOUSTIC DETECTION;
SAPPHIRE SUBSTRATES;
THIN FILM METROLOGY;
VISCO-ELASTIC MATERIAL;
THIN FILMS;
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EID: 77951581024
PISSN: 18753884
EISSN: 18753892
Source Type: Conference Proceeding
DOI: 10.1016/j.phpro.2010.01.045 Document Type: Conference Paper |
Times cited : (8)
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References (7)
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