Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2009, Pages 000594-000596

  Kuo, Shou Yi ^a   Jeng, Ming Jer ^a   Chang, Liann Be ^a   Lin, Wei Ting ^a   Hu, Sung Cheng ^b   Lu, Yung Tien ^b   Wu, Ching Wen ^b  

^a CHANG GUNG UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON FLOW RATE; GLASS SUBSTRATES; GROWTH PARAMETERS; MOLYBDENUM FILMS; OPTIMAL THICKNESS; RF-MAGNETRON SPUTTERING; RF-POWER; SODA LIME GLASS SUBSTRATE; SUBSTRATE TEMPERATURE; THIN FILM SOLAR CELLS;

ADHESION; ARGON; ELECTRIC RESISTANCE; GALLIUM; GALLIUM ALLOYS; GLASS; MAGNETRON SPUTTERING; MOLYBDENUM; MOLYBDENUM PLATING; SEMICONDUCTING SELENIUM COMPOUNDS; SHEET RESISTANCE; SUBSTRATES; THIN FILMS;

COPPER;

EID: 77951574440     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2009.5411612     Document Type: Conference Paper

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