Multi-layer metal micromachining for THz waveguide fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7590, Issue , 2010, Pages

  Rowen, Adam ^a   Hollowell, Andrew E ^a   Wanke, Michael ^a   Nordquist, Christopher D ^a   Arrington, Christian ^b   Gillen, Rusty ^a   Coleman, Jonathan J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b LMATA Government Services LLC   (United States)

Author keywords

Electrochemical deposition; Electroplating; Metal; Micromachining; Multi layer; Plating; Quantum cascade laser; Rectangular waveguide; Three dimensional; THz

Indexed keywords

ELECTROCHEMICAL DEPOSITION; ELECTROPLATED GOLD; HOLLOW STRUCTURE; LITHIUM DISILICATE; NON-PLANAR SUBSTRATES; OPTICALLY CLEAR; RECTANGULAR CHANNEL; RESIST REMOVAL; SECOND LAYER; TERAHERTZ FREQUENCIES; THICK WAVEGUIDES; WAVEGUIDE FABRICATION; WAVEGUIDE WALL;

COMPOSITE MICROMECHANICS; ELECTROPLATING; GOLD DEPOSITS; HORN ANTENNAS; LITHIUM; MACHINE COMPONENTS; METALS; MICROANALYSIS; MICROFABRICATION; MICROMETERS; PHOTORESISTS; QUANTUM CASCADE LASERS; RECTANGULAR WAVEGUIDES; REDUCTION; THREE DIMENSIONAL;

MICROMACHINING;

EID: 77951567779     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.840247     Document Type: Conference Paper

References (11)

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