A bottleneck detection and dynamic dispatching strategy for semiconductor wafer fabrication facilities

Proceedings - Winter Simulation Conference

Volumn , Issue , 2009, Pages 1646-1656

  Zhou, Zhugen ^a   Rose, Oliver ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTLENECK DETECTION; BOTTLENECK MACHINES; COMPLEX MANUFACTURING SYSTEMS; CRITICAL RATIO; CYCLE TIME; FIRST IN FIRST OUTS; ON-TIME DELIVERY; SEMICONDUCTOR WAFER FABRICATION; SIMULATION RESULT; THEORY OF CONSTRAINT; WAFER FAB; WORK IN PROCESS;

INSPECTION;

SILICON WAFERS;

EID: 77951529618     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2009.5429181     Document Type: Conference Paper

References (8)

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