Nonlinear mathematical model for a biaxial MOEMS scanning mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7594, Issue , 2010, Pages

  Ma, Yunfei ^a   Davis, Wyatt O ^a   Ellis, Matt ^a   Brown, Dean ^a  

^a MICROVISION INC   (United States)

Author keywords

Back EMF; Coil self heating; Nonlinear damping; Quality factor; Scanning mirror; Two body dynamics

Indexed keywords

BACK-EMF; NONLINEAR DAMPING; QUALITY FACTORS; SCANNING MIRROR; SELF-HEATING; TWO-BODY DYNAMICS;

DAMPING; FINITE ELEMENT METHOD; HEATING; MIRRORS; Q FACTOR MEASUREMENT; SCANNING; SIGNAL TO NOISE RATIO;

MATHEMATICAL MODELS;

EID: 77951529190     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.843084     Document Type: Conference Paper

References (4)

1. Yalcinkaya, A., Urey, H., Brown, D., Montague, T., and Sprague, R., "Two-axis electromagnetic microscanner for high-resolution displays", Journal of Microelectromechanical Systems, 15(4), pp. 786-794 (2006). (Pubitemid 44251386)
2. Davis, W., Sprague, R., and Miller, J., "MEMS-based pico-projector display," Proc. IEEE/LEOS Optical MEMS and Nanophotonics, pp. 31-32 (2008).
3. Davis, W. "Empirical analysis of form drag damping for scanning micromirrors", Proc. SPIE 7208, (2009).
4. Ying, Shuh-Jing, [Advanced dynamics], AIAA (1997).