Empirical analysis of form drag damping for scanning micromirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7208, Issue , 2009, Pages

  Davis, Wyatt O ^a  

^a MICROVISION INC   (United States)

Author keywords

Air drag; Drag coefficient; Nonlinear damping; Quality factor; Scanning mirror

Indexed keywords

ACTUATOR SYSTEM; AIR DRAG; CRITICAL FACTORS; EMPIRICAL ANALYSIS; EXPERIMENTAL MEASUREMENTS; FORM DRAG; MEMS SCANNING MIRROR; MICRO MIRROR; NONLINEAR DAMPING; QUALITY FACTOR; RESONANT SCANNING; SCANNING MIRROR;

DAMPING; DRAG; DRAG COEFFICIENT; MIRRORS; Q FACTOR MEASUREMENT; REYNOLDS NUMBER;

SCANNING;

EID: 67649205820     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.809886     Document Type: Conference Paper

References (12)

1. Cho, Y. H., Pisano, A. P., and Howe, R. T., "Viscous damping model for laterally oscillating microstructures," Journal of Microelectromechanical Systems, 3(2), 81-87 (1994).
2. Blech, J. J., "On isothermal squeeze films," Journal of Lubrication Technology, vol. 105, 615-620 (1983).
3. Pan, F., Kubby, J., Peeters, E., Tran, A. T., and Mukherjee, S., "Squeeze film damping effect on the dynamic response of a MEMS torsion mirror," Journal of Micromechanics and Microengineering, vol. 8, 200-208 (1998).
4. Vemuri, S., Fedder, G. K., and Mukherjee, T., "Low order squeeze film model for simulation of MEMS devices," Proc. International Conference on Modeling and Simulation of Microsystems, MSM 2000, 205-208 (2000).
5. Veijola, T., "Analytic model for perforated squeeze film dampers," Proc. Design Test Integration and Packaging of MEMS/MOEMS, DTIP 2006, pp. 36-41 (2006).
6. Sandner, T., Klose, T., Wolter, A., Schenk, H., Lakner, H., and Davis, W., "Damping analysis and measurement for a comb-drive scanning mirror," Proc. SPIE 5455, 147-158 (2004).
7. Klose, T., Sandner, T., Schenk, H., and Lakner, H., "Extended damping model for out-of-plane comb driven micromirrors," Proc. SPIE 6114, (2006).
8. Davis, W., Sprague, R., and Miller, J., "MEMS-based pico-projector display," Proc. IEEE/LEOS Optical MEMS and Nanophotonics, 31-32 (2008).
9. Yalcinkaya, A., Urey, H., Brown, D., Montague, T., and Sprague, R., "Two-axis electromagnetic microscanner for high-resolution displays", Journal of Microelectromechanical Systems, 15(4), 786-794 (2006).
10. Davis, W., Brown, D., Helsel, M., Sprague, R., and Gibson, G., "High performance silicon scanning mirror for laser printing," Proc. SPIE 6466, (2007).
11. Roberson, J. A., and Crowe, C. T., [Engineering Fluid Mechanics], Houghton-Mifflin (1990).
12. Rao, S. S., [Mechanical Vibrations], Prentice-Hall (1995).